Measuring & Analysis Methods

The examination and evaluation of materials, products, and process media requires the use of modern measurement and analysis methods.

We use measurement and analysis methods with high detection sensitivity and high location resolution that are tailored to each individual task. The SGS INSTITUT FRESENIUS has extensive analytical experience and operates state-of-the-art service laboratories. We are happy to support you in your product development, process and production control, failure and damage analysis, and more.

Our laboratory equipment and analytical methods (extract)

Material analysis

  • Metallography / light microscopy
  • Hardness according to Vickers
  • Optical emission spectrometry (F-OES)
  • X-ray fluorescence spectroscopy (RFA)
  • Scanning electron microscopy (SEM)
  • Energy dispersive X-ray spectroscopy (EDX)


Analytics for microelectronics

  • Scanning electron microscopy (SEM)
  • Energy dispersive X-ray spectroscopy (EDX)
  • Focused ion beam (FIB), including circuit modification
  • Transmission electron microscopy (TEM)
  • Opening of chip (while maintaining its function) / chip recovery
  • Cross section preparation + surface parallel preparation (delayering)
  • X-ray microscopy (XRAY)
  • Scanning acoustic microscopy (SAM)
  • Ion chromatography (PEM-IC) in cleanroom
  • Vapor phase decomposition ICP-MS (VPD-ICP-MS)
  • Total reflection X-ray fluorescence analysis (TXRF)


Physical surface analysis

  • Auger electron spectroscopy (AES)
  • X-ray photoelectron spectroscopy (XPS)
  • Secondary ion mass spectrometry (SIMS)
  • Time of flight secondary ion mass spectrometry (ToF-SIMS)
  • Spreading resistance profiling (SRP)
  • Tactile profilometers
  • Atomic force microscopy (AFM)
  • Electron probe microanalysis (EPMA)


Chemical analytics

  • Fourier-transform infrared spectroscopy (FTIR, ATR, IR microscopy, KBr disc)
  • Raman spectroscopy (microscopy)
  • X-ray diffraction (XRD) (accredited according to DIN EN 13925-2)
  • Thermogravimetry (TG) (accredited according to DIN EN ISO 11358)
  • Dynamic scanning calorimetry (DSC) (accredited according to DIN EN ISO 11357)
  • Differential thermal analysis (DTA)
  • Dynamic mechanical analysis (DMA)
  • Gas chromatography–mass spectrometry (GC-MS)
  • Thermal desorption system GC-MS (TDS-GC-MS)
  • Inductively coupled plasma mass spectrometry (ICP-MS)
  • Inductively coupled plasma optical emission spectrometry (ICP-OES)
  • Ion chromatography (IC)
  • High-performance liquid chromatography (HPLC)
  • Identification of volatile organic compounds by solid-phase microextraction GC‑MS with chemical ionization (VOC-Ident-SPME-GC-CIMS)



Königsbrücker Landstr. 161
01109 Dresden

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