Measuring & Analysis Methods

The examination and evaluation of materials, products, and process media requires the use of modern measurement and analysis methods.

We use measurement and analysis methods with high detection sensitivity and high location resolution that are tailored to each individual task. The SGS INSTITUT FRESENIUS has extensive analytical experience and operates state-of-the-art service laboratories. We are happy to support you in your product development, process and production control, failure and damage analysis, and more.

Our laboratory equipment and analytical methods (extract)

Material analysis

  • Metallography / light microscopy
  • Hardness according to Vickers
  • Optical emission spectrometry (F-OES)
  • X-ray fluorescence spectroscopy (RFA)
  • Scanning electron microscopy (SEM)
  • Energy dispersive X-ray spectroscopy (EDX)


Analytics for microelectronics

  • Scanning electron microscopy (SEM)
  • Energy dispersive X-ray spectroscopy (EDX)
  • Focused ion beam (FIB), including circuit modification
  • Transmission electron microscopy (TEM)
  • Opening of chip (while maintaining its function) / chip recovery
  • Cross section preparation + surface parallel preparation (delayering)
  • X-ray microscopy (XRAY)
  • Scanning acoustic microscopy (SAM)
  • Ion chromatography (PEM-IC) in cleanroom
  • Vapor phase decomposition ICP-MS (VPD-ICP-MS)
  • Total reflection X-ray fluorescence analysis (TXRF)


Physical surface analysis


Chemical analytics



Königsbrücker Landstr. 161
01109 Dresden

t +49 351 8841-200
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