Over the last decades, scanning electron microscopy (SEM) and transmission electron microscopy (TEM) have developed into standard techniques for analysing integrated circuits.
In view of the increasing number of contacts and vias and the increasing density ofmetal lines, modern wafer production would be unimaginable without these inspection techniques.
Complicated preparations are often necessary before SEM and TEM analyses can be carried out.
SGS INSTITUT FRESENIUS has many years of experience in the field of sample preparation as well as in SEM and TEM analytics and uses these methods in a targeted fashion in combination with other processes.
SGS INSTITUT FRESENIUS GmbH
Königsbrücker Landstr. 161
t: +49 351 8841 - 0
f: +49 351 8841 – 190